Effective manufacturing processes are critical for producing smaller, more powerful computer chips on tighter production schedules. This demands motion systems with extreme precision, speed, and reliability. Frameless direct-drive torque motors excel at providing this kind of controlled motion. Their simplicity also makes them highly reliable for automation.
Wafer Processing Equipment
Tools like etchers, deposition systems, and diffusion furnaces rely on direct drive motors to precisely position and spin wafers. Their high torque and minimal vibration allow delicate wafer spinning, translation, and rotational motion during complex processes with tight tolerances. This enables uniform removal of material and deposition at a microscopic scale across wafer surfaces.
Inspection and Metrology Equipment
Metrology systems rely on direct drive motor stages to position wafers, cameras, and probes to detect defects and measure dimensions accurately. Their ability to deliver torque without gear backlash enables the capture of large quantities of high-resolution inspection data across the full wafer surface area.
Ion Implantation Systems
The motors precisely position the ion beam source, ensuring accurate targeting and control of the ion beam's energy and dose during the implantation process. This allows for precise doping of the semiconductor material. The motors also control the movement of the wafer stage, allowing for accurate positioning of the semiconductor wafer during the ion implantation process.
Lithography Systems
In lithography systems, the motors precisely position the exposure stage, enabling accurate alignment and movement of the semiconductor wafer during exposure. This ensures precise patterning of the wafer surface with high-resolution and subtle details required for advanced semiconductor devices.
Vacuum Systems
These motors control the movement of various components within the vacuum environment, such as vacuum pumps, valves, and wafer handling mechanisms. They control the rotational motion of the pump's impeller, allowing efficient and reliable evacuation of air and gases from the process chamber. The motors also control the movement of valves within the vacuum system, precisely controlling the gas flow, pressure, and isolation of different process chambers.
As these applications grow more complex, so does the need for a reliable partner. Mosrac has decades of experience solving diverse engineering challenges. To learn how our frameless torque motors could augment your innovation, visit our website or connect with our application experts.